Present perfect progressive tense is formed with the modal Have (or Has for the third person; he/she/it) followed by Been followed by the of the verb in its -ing form. As it is the case in sentence 1
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Past perfect progressive this formed with the modal Had followed by Been followed by the of the verb in its -ing form. As it is the case in sentences 2 and 3
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Future perfect progressive tense is formed with the modal Will followed by the modal Have followed by Been followed by the of the verb in its -ing form. As it is the case in sentence 4.