Answer:
a)
# for a g line, R = 1.211 μm
# for an I-line, R = 1.013 μm
b)
# for a g line, R = 0.726 μm
# for an I-line, R = 0.243 μm
c)
# for a g line, R = 0.605 μm
# for an I-line, R = 0.608 μm
Explanation:
We know that;
Rayleigh Resolution R = 0.5 × λ/NA
for a g line, λ = 436 nm
for an I-line λ = 365 nm
a)
Now when NA = 0.18
# for a g line, λ = 436 nm
R = 0.5 × 436/0.18 = 1.211 μm
# for an I-line λ = 365 nm
R = 0.5 × 365/0.18 = 1.013 μm
b)
when NA = 0.30
# for a g line, λ = 436 nm
R = 0.5 × 436/0.30 = 0.726 μm
# for an I-line λ = 365 nm
R = 0.5 × 365/0.30 = 0.243 μm
c)
when NA = 0.36
# for a g line, λ = 436 nm
R = 0.5 × 436/0.36 = 0.605 μm
# for an I-line λ = 365 nm
R = 0.5 × 365/0.30 = 0.608 μm
