Consider a fully-clamped circular diaphragm poly-Si with a radius of 250 μm and a thickness of 4 μm. Assume that Young’s modulus
is 130 GPa and Poisson’s ratio is 0.3. A uniform pressure of 20 kPa is applied.
(a) What is the stress at the center of the diaphragm?
(b) What is the radial stress at the fully-clamped edge of the diaphragm?
(c) What is the transverse stress at the fully-clamped edge of the diaphragm?
(d) What is the amount of deflection at the center of the diaphragm?
(a) What is the stress at the center of the diaphragm?
(b) What is the radial stress at the fully-clamped edge of the diaphragm?
(c) What is the transverse stress at the fully-clamped edge of the diaphragm?
(d) What is the amount of deflection at the center of the diaphragm?
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