Question

name the three exposure techniques in photolithography. what are the alternatives to photolithography in ic processing?

Answer 1

The three exposure techniques in photolithography are:

• Contact
• Proximity
• Projection

Alternatives to photolithography in IC processing include;

• X-ray
• UV
• Ion, and
• Electron lithography

What is Photolithography?

Photolithography is a term in integrated circuit development that describes the patterned films that are formed when a beam of light falls on a substance.

This phenomenon protects the surface of sensitive materials such as glass during some operations like etching. UV and X-rays can be used for this purpose.

Learn more about photolithography here:

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